Tetra Methyl Silane (TMS)

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We are a leading manufacturer and supplier of Tetra Methyl Silane (TMS), a highly versatile organosilicon compound known for its unique properties and broad applications. As a colorless, volatile liquid, TMS serves as a crucial intermediate and reference standard in both industrial and research settings. We ensure high purity, reliable packaging, and consistent supply of Tetra Methyl Silane for global clients across various sectors.

Applications of Tetra Methyl Silane

1. Nuclear Magnetic Resonance (NMR) Spectroscopy

TMS is widely used as an internal reference standard in proton (¹H) and carbon (¹³C) NMR spectroscopy due to its symmetrical molecular structure and shielded methyl groups.

2. Semiconductor & Electronics Industry

TMS acts as a precursor in the Chemical Vapor Deposition (CVD) process to deposit thin films of silicon-containing materials on microelectronic components.

3. Plasma-enhanced Deposition

Utilized in low-k dielectric film deposition processes, especially in advanced integrated circuit fabrication.

4. Surface Coatings & Hydrophobic Treatments

Tetra Methyl Silane is used in surface modification applications to impart hydrophobic properties on glass, ceramics, and textiles.

5. Intermediate in Organic Synthesis

Used in research labs and industry as a reagent or intermediate for synthesizing other silicon-based compounds.

Anshul Specialty Molecules Private Limited

Flexcel Park, C Wing, 2nd Floor, S. V. Road, Near 24 Karat Multiplex, Jogeshwari (West), Mumbai 400 102.

Ph : + 91 22 62252900  |  info@anshulchemicals.com

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Product Specifications

Product NameTetra Methyl Silane
SynonymsSilicon tetramethyl
CAS No75-76-3
EC No200-899-1
Molecular FormulaC₄H₁₂Si
ManufacturerAnshul Specialty Molecules Pvt. Ltd.
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Tetra Methyl Silane (TMS) chemical structure